Amorphous carbon film deposition on inner surface of tubes using atmospheric pressure pulsed filamentary plasma source

TL;DR

This study demonstrates the deposition of uniform amorphous carbon films on the inner surfaces of quartz tubes using a pulsed filamentary plasma source at atmospheric pressure, analyzing plasma characteristics and film composition.

Contribution

It introduces a novel method for depositing amorphous carbon films inside tubes using pulsed filamentary plasma and provides detailed plasma and film analysis.

Findings

Deposited films are amorphous, non-hydrogenated sp2 and hydrogenated sp3 carbon.

Long plasma filaments (~140 mm) are generated inside the tube.

Plasma parameters are characterized and linked to film deposition kinetics.

Abstract

Uniform amorphous carbon film is deposited on the inner surface of quartz tube having the inner diameter of 6 mm and the outer diameter of 8 mm. A pulsed filamentary plasma source is used for the deposition. Long plasma filaments (~ 140 mm) as a positive discharge are generated inside the tube in argon with methane admixture. FTIR-ATR, XRD, SEM, LSM and XPS analyses give the conclusion that deposited film is amorphous composed of non-hydrogenated sp2 carbon and hydrogenated sp3 carbon. Plasma is characterized using optical emission spectroscopy, voltage-current measurement, microphotography and numerical simulation. On the basis of observed plasma parameters, the kinetics of the film deposition process is discussed.