Effects of Residual Stress on Static and Dynamic Characteristics of an Electrostatically Actuated Nanobeam

TL;DR

This study investigates how residual stress affects the static and dynamic behavior of electrostatically actuated nanobeams, revealing significant impacts on resonant frequency tunability and stability mechanisms.

Contribution

It introduces a multi-modal reduced order model to analyze residual stress effects on nanobeam characteristics, validated by numerical solutions.

Findings

Residual stress significantly influences nanobeam static and dynamic properties.

Resonant frequency tunability increases with compressive residual stress.

A stability mechanism for resonant frequency under temperature variation is identified.

Abstract

Electrostatically actuated nanotubes and nanowires have many promising applications as nano-switches, ultra sensitive sensors and signal processing elements. These devices can be modelled as slender beams with circular cross-section. In this paper, effects of residual stress on static and dynamic characteristics of a cylindrical nanobeam are presented. Galerkin based multi-modal reduced order model technique has been used to solve the governing differential equation. The equation has also been solved numerically by collocation method for verification of the results. The effects of higher modes in reduced order modelling have been investigated. The analysis shows that the residual stress significantly influence the static and dynamic characteristics of the nanobeam. In particular, the results show that resonating frequency tunability increases significantly under the presence of compressive residual stress. In addition, an inherent resonating frequency stability mechanism under temperature variation in nanobeam resonators has also been explored.