Blowing of polysilicon fuses

TL;DR

This paper introduces a comprehensive zero-dimensional model for polysilicon fuse programming, incorporating electrical, thermal, and flow aspects to predict fuse behavior accurately.

Contribution

It presents a novel integrated model combining electrical, thermal, and flow dynamics for polysilicon fuse programming, improving predictive accuracy over previous models.

Findings

Model accurately predicts fuse resistance changes.

Reproduces trends with voltage and fuse size.

Provides insights into fuse disconnection mechanisms.

Abstract

Polysilicon fuses are one time programmable memory elements which allow the calibration of integrated circuits at wafer and package level. We present a zero dimensional lumped parameter model of the programming of fuses made from a combination of tungsten silicide and polycrystalline silicon. The components of the model are an electrical model, a thermal model and a flow model. The electrical model describes the temperature and geometry dependent resistance of the fuse. The thermal model describes the heating and melting of the fuse and its surroundings. The flow model describes the disconnection of the fuse by electromigration driven flow of silica. The model generates quantitatively accurate results and reproduces trends with applied voltage and fuse size.