Atomic-scale electron-beam sculpting of defect-free graphene nanostructures
Bo Song, Gr\'egory F. Schneider, Qiang Xu, Gr\'egory Pandraud, Cees, Dekker, Henny Zandbergen

TL;DR
This paper presents a temperature-controlled electron-beam technique for damage-free, atomic-scale sculpting of graphene, utilizing a self-repair mechanism active above 600°C to maintain its crystalline structure during nanostructure fabrication.
Contribution
It introduces a novel temperature-dependent self-repair process enabling damage-free atomic-scale shaping of graphene with a focused electron beam.
Findings
Self-repair mechanism active above 600°C maintains graphene's crystalline structure.
Reproducible fabrication of nanoribbons, nanotubes, and nanopores.
Electron beam induces damage but is repaired at high temperatures.
Abstract
In order to harvest the many promising properties of graphene in (electronic) applications, a technique is required to cut, shape or sculpt the material on a nanoscale without damage to its atomic structure, as this drastically influences the electronic properties of the nanostructure. Here, we reveal a temperature-dependent self-repair mechanism allowing damage-free atomic-scale sculpting of graphene using a focused electron beam. We demonstrate that by sculpting at temperatures above 600 {\deg}C, an intrinsic self-repair mechanism keeps the graphene single-crystalline during cutting, even thought the electron beam induces considerable damage. Self-repair is mediated by mobile carbon ad-atoms constantly repairing the defects caused by the electron beam. Our technique allows reproducible fabrication and simultaneous imaging of single-crystalline free-standing nanoribbons, nanotubes,…
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