Characteristics of the Sculptured Cu Thin Films and Their Optical Properties as a function of deposition rate

TL;DR

This study investigates how varying deposition rates affect the nano-structure, morphology, and optical properties of sculptured copper thin films, combining experimental characterization with optical modeling.

Contribution

It provides a comprehensive analysis of the relationship between deposition rate, film structure, and optical properties using experimental and modeling techniques.

Findings

Deposition rate influences nano-structure and morphology.

Optical properties vary with deposition conditions.

Modeling accurately fits experimental transmittance data.

Abstract

Sculptured copper thin films were deposited on glass substrates, using different deposition rates. The nano-structure and morphology of the films were obtained, using X-ray diffraction (XRD), atomic force microscopy (AFM) and scanning electron microscopy (SEM). Their optical properties were measured by spectrophotometry in the spectral range of 340-850 nm. The Scot package was used for modeling the film structure and fitting the calculated optical transmittance results to the experimental data and obtaining, both real and imaginary refractive indices, film thickness and fraction of metal inclusion in the film structure.