Development of a Compact Resonance Ionization Mass Spectrometer for Trace Element Analysis of Potassium
Yoshihiro Iwata, Yoshizumi Inoue, and Makoto Minowa

TL;DR
This paper presents a compact resonance ionization mass spectrometer using diode lasers for trace potassium analysis, measuring isotope shifts and demonstrating its potential for detecting trace impurities in materials.
Contribution
The development of a compact RIMS with diode lasers and quadrupole mass spectrometer for precise isotope shift measurement and trace element analysis is novel.
Findings
Measured isotope shifts of $^{40}{ m K}$ and $^{41}{ m K}$ with respect to $^{39}{ m K}$.
Achieved an overall detection efficiency of approximately 10^{-6}.
Demonstrated potential for trace impurity detection in semiconductor materials.
Abstract
A compact resonance ionization mass spectrometer is developed using two laser diodes and a quadrupole mass spectrometer to perform trace element analysis of potassium. With the help of a narrow linewidth of the laser diode, the isotope shifts of and of the 405 nm line with respect to , corresponding to the transition of S P, are measured to be MHz and MHz, respectively, by comparing them to the known hyperfine splitting widths of the ground state of each potassium isotope. The overall detection efficiency of an order of in our setup indicates the availability of RIMS to the analysis of the trace metal impurities on or in a certain material such as the contamination assessment of semiconductor wafers.
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Taxonomy
TopicsAnalytical chemistry methods development
