Flexible and biocompatible microelectrode arrays fabricated by supersonic cluster beam deposition on SU-8

TL;DR

This paper presents a novel method using supersonic cluster beam deposition to create flexible, biocompatible microelectrode arrays on SU-8, demonstrating good electrical, adhesion, and biological properties.

Contribution

It introduces a new fabrication technique for microelectrode arrays that enhances adhesion, conductivity, and biocompatibility on SU-8 substrates.

Findings

Nanocomposite layer shows ohmic conduction

Enhanced cell growth on nanocomposite surface

Successful fabrication of flexible microelectrode arrays

Abstract

We fabricated highly adherent and electrically conductive micropatterns on SU-8 by supersonic cluster beam deposition (SCBD). This technique is based on the acceleration of neutral metallic nanoparticles produced in the gas phase. The kinetic energy acquired by the nanoparticles allows implantation in a SU-8 layer, thus producing a metal-polymer nanocomposite thin layer. The nanocomposite shows ohmic electrical conduction and it can also be used as an adhesion layer for further metallization with a metallic overlayer. We characterized the electrical conduction, adhesion and biocompatibility of microdevices obtained by SCBD on SU-8 demonstrating the compatibility of our approach with standard lift off technology on 4" wafer. A self-standing and flexible Micro Electrode Array has been produced. Cytological tests with neuronal cell lines demonstrated an improved cell growth and a spontaneous confinement of cells on the nanocomposite layer.