Pulsed laser deposition of SrTiO3/LaGaO3 and SrTiO3/LaAlO3: plasma plume effects

TL;DR

This study investigates how plasma plume dynamics during pulsed laser deposition influence the growth quality and defect formation at SrTiO3-based interfaces, affecting their electronic properties.

Contribution

It provides new insights into the effects of plasma plume energy on layer-by-layer growth and interfacial defects at SrTiO3/LaGaO3 and SrTiO3/LaAlO3 interfaces.

Findings

Layer-by-layer growth confirmed up to 10^-1 mbar oxygen pressure.

Plasma plume energy impacts interfacial defect formation.

Interfacial defects influence the electronic conductivity.

Abstract

Pulsed laser deposition of SrTiO3/LaGaO3 and SrTiO3/LaAlO3 interfaces has been analyzed with a focus on the kinetic energy of the ablated species. LaGaO3 and LaAlO3 plasma plumes were studied by fast photography and space-resolved optical emission spectroscopy. Reflection high energy electron diffraction was performed proving a layer-by-layer growth up to 10-1 mbar oxygen pressure. The role of the energetic plasma plume on the two-dimensional growth and the presence of interfacial defects at different oxygen growth pressure has been discussed in view of the conducting properties developing at such polar/non-polar interfaces.