Atomic Imaging Using Secondary Electrons in a Scanning Transmission Electron Microscope : Experimental Observations and Possible Mechanisms

TL;DR

This study demonstrates atomic-scale imaging using secondary electrons in a transmission electron microscope, revealing new insights into contrast mechanisms and surface sensitivity, with potential to transform electron microscopy techniques.

Contribution

The paper provides the first detailed experimental investigation of atomic SE imaging in a high-resolution TEM, proposing mechanisms and demonstrating surface sensitivity at atomic scale.

Findings

Atomic SE imaging achievable for elements from uranium to carbon.

SE image contrast depends on bias, atomic number, tilt, and thickness.

SE signal is sensitive to surface terminating species.

Abstract

We report our detailed investigation of high-resolution imaging using secondary electrons (SE) with a subnanometer probe in an aberration-corrected transmission electron microscope, Hitachi HD2700C. This instrument also allows us to acquire the corresponding annular-dark-field (ADF) images simultaneously and separately. We demonstrate that atomic SE imaging is achievable for a wide range of elements, from uranium to carbon. Using the ADF images as a reference, we study the SE image intensity and contrast as a function of applied bias, atomic number, crystal tilt and thickness to shed light on the origin of the unexpected ultrahigh resolution in SE imaging. We have also demonstrated that the SE signal is sensitive to the terminating species at a crystal surface. Possible mechanisms for atomicscale SE imaging are proposed. The ability to image both the surface and bulk of a sample at atomic scale is unprecedented, and could revolutionize the field of electron microscopy and imaging.