Possibilities of application of elastic mid-IR light scattering for inspection of internal gettering operations

TL;DR

This paper demonstrates that low-angle mid-IR light scattering can be used as a contactless, non-destructive method to inspect internal gettering in CZ silicon crystals, aiding quality control.

Contribution

It introduces a novel application of mid-IR light scattering for inspecting internal gettering, including classification of scattering inhomogeneities before and after the process.

Findings

Mid-IR light scattering effectively detects internal gettering.

The method allows classification of inhomogeneities in silicon crystals.

It provides a non-destructive inspection technique.

Abstract

A method of low-angle mid-IR light scattering is shown to be applicable for the contactless and non-destructive inspection of the internal gettering process in CZ Si crystals. A classifcation of scattering inhomogeneities in initial crystals and crystals subjected to the getting process is presented.