Silicon Waveguides and Ring Resonators at 5.5 {\mu}m

TL;DR

This paper reports the development of low-loss silicon waveguides and ring resonators operating at mid-infrared wavelengths around 5.5 micrometers, demonstrating fabrication and performance metrics.

Contribution

It introduces the first ring resonators at 5.4 to 5.6 micrometers on silicon-on-sapphire with specific fabrication and loss characteristics.

Findings

Waveguide losses of 4.0 +/- 0.7 dB/cm achieved

Ring resonators with Q-values of 3.0 k demonstrated

Successful fabrication using electron-beam lithography

Abstract

We demonstrate low loss ridge waveguides and the first ring resonators for the mid-infrared, for wavelengths ranging from 5.4 to 5.6 {\mu}m. Structures were fabricated using electron-beam lithography on the silicon-on-sapphire material system. Waveguide losses of 4.0 +/- 0.7 dB/cm are achieved, as well as Q-values of 3.0 k.