Analysis of the manufacturing variation in a coupled micro resonators array based on its designed value and measured eigenfrequencies

TL;DR

This paper presents an analytical model to assess manufacturing variations in coupled micro resonator arrays, enabling estimation of variation ranges from measured eigenfrequencies to improve device design and optimization.

Contribution

It introduces a novel analytical approach to quantify manufacturing variations and estimate their ranges based on frequency measurements in coupled micro resonator systems.

Findings

Model accurately predicts manufacturing variation effects

Enables estimation of variation ranges from eigenfrequencies

Supports design optimization of micro resonator arrays

Abstract

Manufacturing variation in the micro fabrication process inevitably alters the size of the designed structure and thereafter influences the performance of devices to some extent. A good knowledge of this effect will help the design and optimization of the devices. In this letter, we propose an analytical model to investigate the effect of manufacturing variation on the individual resonator in a chain of coupled micro mechanical resonators. The model is also used in a reverse manner to estimate the possible range of manufacturing variation based on the designed value and the measured frequency response.