Variation of the metallic content of Focused Electron Beam Induced Deposition of Cobalt

TL;DR

This study investigates how the metallic content of cobalt deposits created by focused electron beam induced deposition can be controlled by adjusting dwell time, revealing the influence of chamber background hydrocarbons on composition.

Contribution

It demonstrates the tunability of cobalt deposit composition via dwell time adjustments and explains the variation through co-deposition of background hydrocarbons.

Findings

Cobalt concentration varies between 20% and 70% with dwell time.

Background hydrocarbons influence metallic content.

Deposits are experimentally produced and characterized.

Abstract

Cobalt-containing deposits from Cobalt carbonyl are experimentally produced and their composition is measured. The Cobalt concentration is found to be readily tunable between 20 and 70 at.% by variation of the dwell time. The variations in metallic concentration are explained by co-deposition of hydrocarbons present in the chamber background pressure.