Photonic Crystal Nanobeam Cavity Strongly Coupled to the Feeding Waveguide
Qimin Quan, Parag B Deotare, and Marko Loncar
TL;DR
This paper presents a deterministic design and experimental demonstration of a high-Q, wavelength-scale photonic crystal nanobeam cavity with record-high transmission, advancing integrated photonics capabilities.
Contribution
The work introduces a novel deterministic design method for ultrahigh Q, wavelength-scale nanobeam cavities with record-high transmission, validated through fabrication and measurement.
Findings
Achieved Q>10^6 in design, Q=80,000 in experiments
Measured transmission T=73%, highest for such cavities
Demonstrated fabrication in silicon with low-index polymer cap
Abstract
A deterministic design of an ultrahigh Q, wavelength scale mode volume photonic crystal nanobeam cavity is proposed and experimentally demonstrated. Using this approach, cavities with Q>10^6 and on-resonance transmission T>90% are designed. The devices fabricated in Si and capped with low-index polymer, have Q=80,000 and T=73%. This is, to the best of our knowledge, the highest transmission measured in deterministically designed, wavelength scale high Q cavities.
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