Characterisation of the influence function non-additivities for a 1024-actuator MEMS deformable mirror

TL;DR

This paper evaluates the calibration process of a 1024-actuator MEMS deformable mirror, focusing on influence function non-additivities, to improve open-loop control accuracy.

Contribution

It introduces a comprehensive calibration method that accounts for influence function non-additivities to enhance open-loop control of large MEMS deformable mirrors.

Findings

Effective calibration reduces residual errors in open-loop control.

Influence function non-additivities significantly impact mirror performance.

Calibration improves deterministic membrane deflection accuracy.

Abstract

In order to evaluate the potential of MEMS deformable mirrors for open-loop applications, a complete calibration process was performed on a 1024-actuator mirror. The mirror must be perfectly calibrated to obtain deterministic membrane deflection. The actuator's stroke-voltage relationship and the effect of the non- additivity of the influence functions are studied and finally integrated in an open-loop control process. This experiment aimed at minimizing the residual error obtained in open-loop control.