Implicit and electrostatic Particle-in-cell/Monte Carlo model in two dimensional and axisymmetric geometry II: Self-bias voltage effects in capacitively coupled plasmas

TL;DR

This paper presents an implicit PIC/MC model for 2D and axisymmetric capacitively coupled plasmas, analyzing self-bias voltage effects and finite length influences with high numerical accuracy.

Contribution

It introduces a self-consistent implicit PIC/MC model that captures self-bias voltage effects and finite length influences in 2D and axisymmetric plasmas.

Findings

Self-bias dc voltages relate to electrode areas with complex relations.

Finite length effects significantly influence voltage behavior.

PIC/MC model provides detailed plasma properties without numerical diffusion.

Abstract

With an implicit Particle-in-cell/Monte Carlo model, capacitively coupled plasmas are studied in two-dimensional and axisymmetric geometry. Self-bias dc voltage effects are self-consistently considered. Due to finite length effects, the self-bias dc voltages show sophisticating relations with the electrode areas. Two-dimensional kinetic effects are also illuminated. Compare to the fluid mode, PIC/MC model is numerical-diffusion-free and thus finer properties of the plasmas are simulated.