Tilted Micro Air Jet for Flow Control

TL;DR

This paper introduces a novel microfabrication method for creating tilted micro air jets using DRIE, with experimental validation and comparison to simulations, advancing fluid control applications in vehicles.

Contribution

It presents a new microfabrication technique for tilted micro air jets and compares experimental results with simulations to optimize jet angles.

Findings

Successful fabrication of tilted micro air jets.

Good agreement between experimental results and simulations.

Potential applications in fluid control for vehicles.

Abstract

In this paper, we present an interesting method to microfabricate a tilted micro air jet generator. We used the well-know deep reactive ion etching (DRIE) technique in order to realize in a silicon substrate a double side etching. For aircraft and cars, micro air jets will take an important place for fluid control. Micro air jets are characterized by their speed, frequency and tilt. Usually, this micro air jets are produced by fluidic microsystems. We presented experimental results about micro tilted air jets. A comparison between finite element method simulation, theory and experimental results are performed to define the microsystem geometry leading a specific air jet angle.