A novel technique to reduce spherical aberration effects in small angle electrostatic deflector system
P. Mandal, G. Sikler, M. Mukherjee
TL;DR
This paper introduces a new technique aimed at reducing spherical aberration in small angle electrostatic deflector systems, enhancing their precision and performance.
Contribution
The paper presents a novel method specifically designed to mitigate spherical aberration effects in electrostatic deflectors at small angles.
Findings
Significant reduction in spherical aberration observed
Improved deflector resolution demonstrated
Technique applicable to various electrostatic systems
Abstract
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Taxonomy
TopicsOptical Coatings and Gratings · Advancements in Photolithography Techniques · Surface and Thin Film Phenomena