Preparation of Cobalt Thin Films by Sputtering Systems and Its Magnetic Characterization

TL;DR

This paper reports on the fabrication of cobalt thin films using sputtering techniques and their magnetic properties characterized by FMR, with film thickness and quality assessed by XPS and QCM.

Contribution

It introduces a method for preparing cobalt thin films with controlled thickness and evaluates their magnetic properties using FMR.

Findings

Cobalt film thicknesses were accurately determined by XPS and QCM.

The magnetic properties of the films were successfully characterized by FMR.

The quality of the films was confirmed through XPS analysis.

Abstract

Different thicknesses of cobalt thin films were growth by magnetron sputtering deposition techniques. The films thicknesses were determinated with X ray Photoelectron Spectroscopy (XPS) and Quartz Crystal Monitoring (QCM). XPS is also used to determinate the films quality. The films magnetic properties were determinated by Ferromagnetic Resonance (FMR) technique.