Photonic Crystal Cavities in Silicon Dioxide
Yiyang Gong, Jelena Vuckovic
TL;DR
This paper investigates silicon dioxide photonic crystal cavities, demonstrating high quality factors through simulation and experiment, with potential applications in visible wavelength photonics.
Contribution
It presents the design, fabrication, and analysis of silicon dioxide nanobeam photonic crystal cavities with high quality factors in the visible range.
Findings
Simulation quality factors over 10^4
Experimental quality factors over 5*10^3
Mode volume of 2.0 cubic wavelengths in oxide
Abstract
One dimensional nano-beam photonic crystal cavities fabricated in silicon dioxide are considered in both simulation and experiment. Quality factors of over 10^4 are found via simulation, while quality factors of over 5*10^3 are found in experiment, for cavities with mode volumes of 2.0 cubic wavelengths (in oxide) and in the visible wavelength range (600-716nm). The dependences of the cavity quality factor and mode volume for different design parameters are also considered.
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