Cluster Imaging with a Direct Detection CMOS Pixel Sensor in Transmission Electron Microscopy

TL;DR

This paper presents a cluster imaging technique using a direct detection CMOS sensor in transmission electron microscopy, significantly enhancing spatial resolution and image contrast over traditional methods.

Contribution

It introduces a charge centre-of-gravity reconstruction method that improves resolution and contrast in electron microscopy images.

Findings

Point spread function improved by a factor of two to 2.7 microns at 300 keV

Image contrast increased by a factor of three

Demonstrates effectiveness of CMOS sensors for high-resolution TEM imaging

Abstract

A cluster imaging technique for Transmission Electron Microscopy with a direct detection CMOS pixel sensor is presented. Charge centre-of-gravity reconstruction for individual electron clusters improves the spatial resolution and thus the point spread function. Data collected with a CMOS sensor with 9.5 micron pixels show an improvement of a factor of two in point spread function to 2.7 micron at 300 keV and of a factor of three in the image contrast, compared to traditional bright field illumination.