Efficient readout of micromechanical resonator arrays in ambient conditions

TL;DR

This paper introduces a magnetomotive method for efficiently reading out multiple micromechanical resonators in ambient conditions, enabling high-throughput sensor array applications by tracking individual resonators despite environmental dissipation.

Contribution

The paper presents a novel magnetomotive spectral readout technique for micromechanical resonator arrays operating at room temperature and atmospheric pressure.

Findings

Resonators with nearly identical frequencies can be individually tracked.

Method operates effectively in dissipative, ambient environments.

Suitable for high-throughput sensor array applications.

Abstract

We present a method for efficient spectral readout of mechanical resonator arrays in dissipative environments. Magnetomotive drive and detection is used to drive double clamped resonators in the nonlinear regime. Resonators with almost identical resonance frequencies can be tracked individually by sweeping the drive power. Measurements are performed at room temperature and atmospheric pressure. These conditions enable application in high throughput resonant sensor arrays.