Growth of Sr1-xCaxRuO3 thin films by metalorganic aerosol deposition
M. Schneider, V. Moshnyaga, P. Gegenwart

TL;DR
This paper demonstrates the successful growth of high-quality Sr1-xCaxRuO3 thin films on different substrates using metalorganic aerosol deposition, with detailed structural and microstructural characterization.
Contribution
It introduces a novel application of metalorganic aerosol deposition for growing Sr1-xCaxRuO3 thin films with high structural quality.
Findings
Films exhibit in-plane epitaxy on SrTiO3.
Surface roughness is minimal on SrTiO3 substrates.
Residual resistivity ratios reach up to 29.
Abstract
We report the growth of thin films of Sr1-xCaxRuO3 on SrTiO3 and MgO substrates by metalorganic aerosol deposition. The structure and microstructure is characterized by X-ray diffraction and room-temperature scanning tunnelling microscopy (STM), respectively. STM indicates in-plane epitaxy and a small surface roughness for films on SrTiO3. The high-quality of the films is supported by large residual resistivity ratios up to 29.
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