3D nanostructuring of La0.7Sr0.3MnO3 thin film surfaces by scanning tunnelling microscopy
Yun Liu, {\AA}. F. Monsen, J. E. Boschker, E. Wahlstr\"om, A. Borg,, and T. Tybell

TL;DR
This study demonstrates precise 3D nanoscale surface modifications of La0.7Sr0.3MnO3 thin films using scanning tunneling microscopy, enabling controlled etching and surface termination at atomic-scale precision.
Contribution
It introduces a method for controlled 3D nanostructuring of La0.7Sr0.3MnO3 surfaces with atomic-scale accuracy using STM under ambient conditions.
Findings
Achieved lateral structures down to 1.5 nm
Controlled etching depth with half a unit cell precision
Reproducible surface termination control
Abstract
Nanoscale 3D surface modifications, by scanning tunneling microscopy under ambient conditions, of La0.7Sr0.3MnO3 thin films have been performed. It was demonstrated that there are well defined combinations of bias voltages and scan speeds which allow for controlled surface structuring. Lateral structures with sizes down to 1.5 nm are possible to obtain. Moreover, it is possible to reproducibly control the depth of etching with half a unit cell precision, enabling design of 3D surface structures and control of the surface termination of La0.7Sr0.3MnO3 through etching.
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