Multiplexed broadband beam steering system utilizing high speed MEMS mirrors

TL;DR

This paper introduces a high-speed, broadband beam steering system using MEMS micromirrors capable of directing multiple laser beams across a wide wavelength range with rapid reconfiguration.

Contribution

It presents a novel MEMS-based beam steering system that supports simultaneous multi-wavelength and multi-beam control with fast settling times.

Findings

Successfully demonstrated reconfiguration of two beams at different wavelengths

Achieved 4 microsecond settling time for beam steering

Simulations indicate good scalability of the system

Abstract

We present a beam steering system based on micro-electromechanical systems technology that features high speed steering of multiple laser beams over a broad wavelength range. By utilizing high speed micromirrors with a broadband metallic coating, our system has the flexibility to simultaneously incorporate a wide range of wavelengths and multiple beams. We demonstrate reconfiguration of two independent beams at different wavelengths (780 and 635 nm) across a common 5x5 array with 4 us settling time. Full simulation of the optical system provides insights on the scalability of the system. Such a system can provide a versatile tool for applications where fast laser multiplexing is necessary.