Depth dependent local structures in thin films unraveled by grazing incidence x-ray absorption spectroscopy

TL;DR

This paper introduces a method combining X-ray absorption spectroscopy with grazing incidence geometry to analyze depth-dependent local structures in thin films, enabling detailed profiling of surface oxidation and internal structures.

Contribution

The paper presents a novel approach for depth profiling in thin films using XAS with grazing incidence, accounting for scattering and absorption effects for accurate structural analysis.

Findings

Successfully determined surface oxidation levels in FePt films

Revealed depth profiles of atomic and electronic structures

Validated the method with nanometric FePt film analysis

Abstract

A method of using X-ray absorption spectroscopy (XAS) together with resolved grazing incidence geometry for depth profiling atomic, electronic, chemical or magnetic local structures in thin films is presented. The quantitative deconvolution of thickness-dependent spectral features is performed by fully considering both scattering and absorption formalisms. Surface oxidation and local structural depth profiles in nanometric FePt films are determined, exemplifying the application of the method.