Growth rate and EBSD texture analysis of nitrogen doped diamond films

TL;DR

This study investigates how nitrogen addition during chemical vapor deposition influences the growth rate, texture, and grain shape of polycrystalline diamond films, revealing a specific nitrogen level enhances {110} fiber texture.

Contribution

It provides new insights into the effect of nitrogen doping on diamond film texture and growth mechanisms using HR-EBSD and XRD analysis.

Findings

1. 1.5% N2 addition enhances {110} fiber texture.

2. Nitrogen influences crystallographic texture and grain shape.

3. Growth selection mechanism explains texture evolution.

Abstract

Chemical-Vapor-Deposition (CVD) diamond films were prepared using a variation of nitrogen addition into the gas source admixture by a direct current CVD method. The influence of nitrogen addition on the crystallographic texture and grain shape evolution in heteroepitaxial polycrystalline diamond films was investigated using high-resolution electron backscattering diffraction (HR-EBSD) and X-ray diffraction (XRD). The analysis reveals that an addition of 1.5% N2 to the CH4 gas flow leads to a strong enhancement of a {110} fiber texture. The phenomenon is discussed in terms of a competitive growth selection mechanism.