Vertical distribution of nitrogen-vacancy centers in diamond formed by ion implantation and annealing
Charles Santori, Paul E. Barclay, Kai-Mei C. Fu, Raymond G. Beausoleil

TL;DR
This study investigates how nitrogen-vacancy centers are distributed vertically in diamond after ion implantation and annealing, highlighting the influence of native nitrogen levels and electron depletion effects relevant for quantum device fabrication.
Contribution
It provides new insights into the vertical distribution of NV centers in diamond and the effects of native nitrogen concentration on their formation and properties.
Findings
NV distribution depends on native nitrogen levels
Spectral measurements show electron depletion effects
Results inform surface-proximate NV center creation for quantum devices
Abstract
Etching experiments were performed that reveal the vertical distribution of optically active nitrogen-vacancy (NV) centers in diamond created in close proximity to a surface through ion implantation and annealing. The NV distribution depends strongly on the native nitrogen concentration, and spectral measurements of the neutral and negatively-charged NV peaks give evidence for electron depletion effects in lower-nitrogen material. The results are important for potential quantum information and magnetometer devices where NV centers must be created in close proximity to a surface for coupling to optical structures.
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