Design of a multichannel 127 degree cylindrical spectrometer for sputtered ions

TL;DR

This paper details the design of a 127-degree electrostatic cylindrical spectrometer with a position-sensitive detector for analyzing sputtered ions, addressing nonlinearities, blurring effects, and field influences.

Contribution

It introduces a novel design of a multichannel cylindrical spectrometer with comprehensive analysis of its operational factors.

Findings

Effective measurement of sputtered ions demonstrated

Analysis of nonlinear and blurring effects included

Design considerations for fringing fields discussed

Abstract

Design details of a 127 degree electrostatic cylindrical spectrometer equipped with a position-sensitive micro-channel plate detector for measuring the sputtered ions in collisions of highly charged ions with solid surface is described. The nonlinear relationship between the point of fall versus the ionic energy, the blurring of the point of fall caused by the divergence of incident angle and the finite entrance aperture, the transform from a position spectrum to an energy spectrum, as well as the influence of the fringing fields are discussed.