Deposition of Diamond-like Carbon films using Dense Plasma Focus

TL;DR

This study explores how elevated substrate temperatures influence the formation of diamond-like carbon films with sp^3 bonds on quartz substrates using Dense Plasma Focus, highlighting a method to control film properties for protective applications.

Contribution

It demonstrates that substrate temperature controls sp^3 bond content in DLC films on quartz, providing a new approach to optimize film properties using DPF.

Findings

DLC films with sp^3 bonds can be formed on quartz at elevated temperatures.

The sp^3 content is proportional to substrate temperature.

Higher substrate temperatures improve film quality for protective coatings.

Abstract

Diamond Like Carbon (DLC) films were deposited on quartz substrates using Dense Plasma Focus (DPF) method. The formation of ${\rm sp^3}$ bonds as is it's content in the film strongly depends on the substrate and it seems quartz is not a suitable substrate. However, we report here the formation of DLC films on quartz substrates that were maintained at elevated temperatures and show the content of carbon atoms with ${\rm sp^3}$ bonds in the film is directly proportional to the substrate's temperature. Not only does this give good control of film fabrication, but also shows how to take advantage of DLC film's anti-wear, scratch resistant properties on material surfaces that require protection.