Fabrication of micro-structures for optically driven micromachines using two-photon photopolymerization of UV curing resins

TL;DR

This paper demonstrates the use of two-photon photopolymerization with UV curing resins to fabricate high-resolution micro-structures for optical micromachines, enabling precise 3D microfabrication for optical manipulation.

Contribution

It introduces a microfabrication system utilizing two-photon photopolymerization for creating detailed 3D micro-structures with sub-diffraction resolution.

Findings

Micro-objects with well-defined 3D features were produced.

Resolution below the diffraction limit was achieved.

The system's performance and capabilities are discussed.

Abstract

Two-photon photopolymerization of UV curing resins is an attractive method for the fabrication of microscopic transparent objects with size in the tens of micrometers range. We have been using this method to produce three-dimensional structures for optical micromanipulation, in an optical system based on a femtosecond laser. By carefully adjusting the laser power and the exposure time we were able to create micro-objects with well-defined 3D features and with resolution below the diffraction limit of light. We discuss the performance and capabilities of a microfabrication system, with some examples of its products.