Thickness Estimation of Epitaxial Graphene on SiC using Attenuation of Substrate Raman Intensity

TL;DR

This paper presents a non-invasive Raman spectroscopy method to estimate the thickness of epitaxial graphene on SiC, allowing for mapping and analysis of multilayer films beyond traditional techniques.

Contribution

It introduces an attenuation-based Raman technique for graphene thickness estimation that is simple, non-destructive, and capable of mapping multilayer regions.

Findings

Attenuation of substrate Raman signal correlates with graphene thickness.

The method enables mapping of graphene layers over large areas.

It surpasses XPS and AES in estimating multilayer graphene thickness.

Abstract

A simple, non-invasive method using Raman spectroscopy for the estimation of the thickness of graphene layers grown epitaxially on silicon carbide (SiC) is presented, enabling simultaneous determination of thickness, grain size and disorder using the spectra. The attenuation of the substrate Raman signal due to the graphene overlayer is found to be dependent on the graphene film thickness deduced from X-ray photoelectron spectroscopy and transmission electron microscopy of the surfaces. We explain this dependence using an absorbing overlayer model. This method can be used for mapping graphene thickness over a region and is capable of estimating thickness of multilayer graphene films beyond that possible by XPS and Auger electron spectroscopy (AES).