Design and Fabrication of a Novel Micro Electromagnetic Actuator
C.-Y. Lee, Zgen-Hui Chen, Hsien-Tseng Chang, Chiang-Ho Cheng,, Chih-Yung Wen
TL;DR
This paper introduces a novel micro electromagnetic actuator with a PDMS membrane and micro coils, offering large deflections, easy fabrication, and compatibility with biomedical chips for potential biomedical applications.
Contribution
It presents a new micro electromagnetic actuator design that is simple to fabricate and integrates seamlessly with biomedical chips, enhancing micro-actuation capabilities.
Findings
Achieved large membrane deflections
Easily fabricated with planar structure
Compatible with biomedical chip integration
Abstract
The present study presents a new micro electromagnetic actuator utilizing a PDMS membrane with a magnet. The actuator is integrated with micro coils to electromagnetically actuate the membrane and results in a large deflection. The micro electromagnetic actuator proposed in this study is easily fabricated and is readily integrated with existing bio-medical chips due to its planar structure.
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