A New Four States High Deflection Low Actuation Voltage Electrostatic Mems Switch for RF Applications

TL;DR

This paper introduces a novel four-state electrostatic MEMS switch with a flexible membrane, achieving large deflections and low actuation voltage, suitable for high-frequency RF applications like 24GHz SPDT switches.

Contribution

The paper presents a new four-state MEMS switch design with improved deflection, contact force, and low voltage operation, based on a flexible membrane and four electrodes.

Findings

Achieved 4μm deflection at 7.5V actuation voltage

Demonstrated suitability for 24GHz RF switching

Enhanced contact and restoring forces

Abstract

This paper presents a new electrostatic MEMS (MicroElectroMechanical System) based on a single high reliability totally free flexible membrane. Using four electrodes, this structure enables four states which allowed large deflections (4$\mu$m) with low actuation voltage (7,5V). This design presents also a good contact force and improve the restoring force of the structure. As an example of application, a Single Pole Double Throw (SPDT) for 24GHz applications, based on this design, has been simulated.