Low Voltage Totally Free Flexible RF MEMS Switch With Anti-Stiction System

TL;DR

This paper introduces a novel RF MEMS switch with low actuation voltage and anti-stiction features, achieved through innovative design and fabrication processes, validated by simulations and RF measurements at 10 GHz.

Contribution

A new RF MEMS switch design with integrated anti-stiction system and low actuation voltage, supported by FEM simulations and experimental RF performance validation.

Findings

Achieved actuation voltage below 5V.

RF performance of -30dB isolation at 10 GHz.

Successful anti-stiction validation through experiments.

Abstract

This paper concerns a new design of RF MEMS switch combined with an innovative process which enable low actuation voltage (<5V) and avoid stiction. First, the structure described with principal design issues, the corresponding anti-stiction system is presented and FEM simulations are done. Then, a short description of the process flow based on two non polymer sacrificial layers. Finally, RF measurements are presented and preliminary experimental protocol and results of anti-stiction validation is detailed. Resulting RF performances are -30dB of isolation and -0.45dB of insertion loss at 10 GHz.