Modelling methodology of MEMS structures based on Cosserat theory

TL;DR

This paper proposes a new modelling methodology for MEMS structures based on Cosserat theory, aiming to improve the accuracy and efficiency of nonlinear dynamic analysis in MEMS design.

Contribution

It introduces a novel modelling approach that captures both linear and nonlinear behaviors of MEMS structures using Cosserat theory, filling a gap in existing simulation methods.

Findings

Efficient modeling of nonlinear MEMS dynamics

Enhanced accuracy in performance verification

Applicable to complex geometrical MEMS structures

Abstract

Modelling MEMS involves a variety of software tools that deal with the analysis of complex geometrical structures and the assessment of various interactions among different energy domains and components. Moreover, the MEMS market is growing very fast, but surprisingly, there is a paucity of modelling and simulation methodology for precise performance verification of MEMS products in the nonlinear regime. For that reason, an efficient and rapid modelling approach is proposed that meets the linear and nonlinear dynamic behaviour of MEMS systems.