Rejection of Power Supply Noise in Wheatstone Bridges : Application to Piezoresistive MEMS
El Mehdi Boujamaa (LIRMM), Yannick Soulie (LIRMM), Fr\'ed\'erick, Mailly (LIRMM), Laurent Latorre (LIRMM), Pascal Nouet (LIRMM)

TL;DR
This paper presents a feedback-based architecture for Wheatstone bridges in piezoresistive MEMS to effectively reject power supply noise and offset, enhancing sensor resolution.
Contribution
It introduces a feedback control method to compensate resistor mismatches in Wheatstone bridges, improving noise rejection and sensor resolution.
Findings
Enhanced offset cancellation with feedback control
Improved resolution in piezoresistive MEMS sensors
Effective rejection of power supply noise
Abstract
This paper deals with the design of MEMS using piezoresistivity as transduction principle. It is demonstrated that when the sensor topology doesn't allow a perfect matching of strain gauges, the resolution is limited by the ability of the conditioning circuit (typically a Wheatstone bridge) to reject power supply noise. As this ability is strongly reduced when an offset voltage is present at the output of the bridge, the proposed architecture implements a feedback loop to control MOS transistors inserted in the Wheatstone bridge to compensate resistor mismatches. This feedback exhibits a very good offset cancellation and therefore a better resolution is achieved.
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Taxonomy
TopicsAdvanced MEMS and NEMS Technologies · Sensor Technology and Measurement Systems · Mechanical and Optical Resonators
