Integrated 3D Sound Intensity Sensor with Four-Wire Particle Velocity Sensors

TL;DR

This paper introduces a compact, low-noise 3D sound intensity sensor that integrates four-wire particle velocity sensors and miniaturized sound pressure sensors using innovative design features.

Contribution

The paper presents a novel symmetrical four-wire sensor configuration and a folded back chamber design for miniaturization and noise reduction.

Findings

Lower noise floor compared to previous sensors

Smaller size enabling more compact applications

Effective integration of sound pressure and particle velocity sensors

Abstract

A new symmetrical four-wire sensor configuration has resulted in a fully integrated sound intensity sensor with significant lower noise floor and smaller size than its predecessors. An integrated sound pressure sensor was further miniaturized by using a folded "back chamber" at both sides of the chip.