Validation of compact models of microcantilever actuators for RF-MEMS application

TL;DR

This paper validates compact 2D and 3D models of microcantilever actuators for RF-MEMS, demonstrating their effectiveness in predicting nonlinear behaviors and offering a simpler alternative to complex reduction techniques.

Contribution

It introduces validated 2D models for microcantilever RF-MEMS, capable of accurately predicting nonlinear pull-in behavior, simplifying analysis compared to traditional reduction methods.

Findings

2D models effectively predict pull-in in nonlinear conditions

Experimental validation confirms model accuracy

Compact models serve as practical substitutes for complex reductions

Abstract

Microcantilever specimens for in-plane and out-ofplane bending tests are here analyzed. Experimental validation of 2D and 3D numerical models is performed. Main features of in-plane and out-of-plane layouts are then discussed. Effectiveness of plane models to predict pull-in in presence of geometric nonlinearity due to a large tip displacement and initial curvature of microbeam is investigated. The paper is aimed to discuss the capability of 2D models to be used as compact tools to substitute some model order reduction techniques, which appear unsuitable in presence of both electromechanical and geometric nonlinearities.