Single Chip Sensing of Multiple Gas Flows

TL;DR

This paper presents a compact silicon-based thermal flow meter capable of independently measuring two gas flows on a single chip, utilizing innovative packaging to direct flows precisely.

Contribution

It introduces a novel single-chip sensor integrating multiple micro-anemometers with a plastic adapter for independent gas flow detection.

Findings

Successful fabrication of a 4x4 mm2 silicon chip with integrated sensors

Effective use of a plastic adapter for flow channeling

Demonstrated capability to measure two independent gas flows

Abstract

The fabrication and experimental characterization of a thermal flow meter, capable of detecting and measuring two independent gas flows with a single chip, is described. The device is based on a 4 x 4 mm2 silicon chip, where a series of differential micro-anemometers have been integrated together with standard electronic components by means of postprocessing techniques. The innovative aspect of the sensor is the use of a plastic adapter, thermally bonded to the chip, to convey the gas flow only to the areas where the sensors are located. The use of this inexpensive packaging procedure to include different sensing structures in distinct flow channels is demonstrated.