RF-MEMS Switched Varactors for Medium Power Applications
F. Maury (XLIM), A. Pothier (XLIM), A. Crunteanu (XLIM), F. Conseil,, P. Blondy (XLIM)
TL;DR
This paper presents a novel RF MEMS switched varactor design with enhanced topology to withstand higher RF power levels, enabling reliable medium power applications such as MEMS-based phase shifters operating under several watts.
Contribution
The paper introduces an improved MEMS switched capacitor topology that enhances power handling and reliability for medium power RF applications.
Findings
Design successfully prevents RF power failure phenomena.
Device demonstrates promising performance at several watts.
Enables fabrication of high-power MEMS phase shifters.
Abstract
In RF (Radio Frequency) domain, one of the limitations of using MEMS (Micro Electromechanical Systems) switching devices for medium power applications is RF power. Failure phenomena appear even for 500 mW. A design of MEMS switched capacitors with an enhanced topology is presented in this paper to prevent it. This kind of device and its promising performances will serve to fabricate a MEMS based phase shifter able to work under several watts.
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Taxonomy
TopicsAdvanced MEMS and NEMS Technologies · Acoustic Wave Resonator Technologies · Radio Frequency Integrated Circuit Design