Study of mechanical response in embossing of ceramic green substrate by micro-indentation
Y. C. Liu, X.-C. Shan

TL;DR
This study uses micro-indentation to analyze the thermo-mechanical response of ceramic green substrates during embossing, revealing how force, temperature, and dwell time influence permanent cavity formation and deformation behavior.
Contribution
It provides new insights into the thermo-mechanical behavior of ceramic green substrates under embossing conditions using micro-indentation testing.
Findings
Permanent cavities form at 25°C to 75°C depending on force and dwell time.
Creep significantly contributes to plastic deformation at higher temperatures.
No significant pile-up observed under compression up to 75°C.
Abstract
Micro-indentation test with a micro flat-end cone indenter was employed to simulate micro embossing process and investigate the thermo-mechanical response of ceramic green substrates. The laminated low temperature co-fired ceramic green tapes were used as the testing material ; the correlations of indentation depth versus applied force and applied stress at the temperatures of 25 degrees C and 75degrees C were studied. The results showed that permanent indentation cavities could be formed at temperatures ranging from 25 degrees C to 75 degrees C, and the depth of cavities created was applied force, temperature and dwell time dependent. Creep occurred and made a larger contribution to the plastic deformation at elevated temperatures and high peak loads. There was instantaneous recovery during the unloading and retarded recovery in the first day after indentation. There was no significant…
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Taxonomy
TopicsNanofabrication and Lithography Techniques · Advanced Surface Polishing Techniques · Electrical and Thermal Properties of Materials
