Study of improving nano-contouring performance by employing cross-coupling controller

TL;DR

This paper introduces a cross-coupling control system with PI controllers to enhance nano-contouring performance, significantly reducing contour errors in stage tracking for precision manufacturing.

Contribution

It proposes a novel two-axis cross-coupling control method that effectively improves stage tracking accuracy and contour error minimization in nano-contouring applications.

Findings

Contour error reduced to approximately 25nm.

Enhanced stage tracking ability demonstrated through experiments.

Effective control strategy for precision stage motion.

Abstract

For the tracking stage path planning, we design a two-axis cross-coupling control system which uses the PI controller to compensate the contour error between axes. In this paper, the stage adoptive is designed by our laboratory (Precision Machine Center of National Formosa University). The cross-coupling controller calculates the actuating signal of each axis by combining multi-axes position error. Hence, the cross-coupling controller improves the stage tracking ability and decreases the contour error. The experiments show excellent stage motion. This finding confirms that the proposed method is a powerful and efficient tool for improving stage tracking ability. Also found were the stages tracking to minimize contour error of two types circular to approximately 25nm.