One MEMS Design Tool with Maximal Six Design Flows

TL;DR

This paper introduces a comprehensive MEMS design tool with six flexible design flows, enabling designers to select optimal workflows across system, device, and process levels for improved efficiency.

Contribution

The paper develops a MEMS design tool with six interconnected flows across three levels, enhancing flexibility and automation in MEMS design processes.

Findings

Six design flows increase design flexibility.

Interfaces enable automatic data transmission.

Design examples verify effectiveness and efficiency.

Abstract

This paper presents one MEMS design tool with total six design flows, which makes it possible that the MEMS designers are able to choose the most suitable design flow for their specific devices. The design tool is divided into three levels and interconnected by six interfaces. The three levels are lumped-element model based system level, finite element analysis based device level and process level, which covers nearly all modeling and simulation functions for MEMS design. The six interfaces are proposed to automatically transmit the design data between every two levels, thus the maximal six design flows could be realized. The interfaces take the netlist, solid model and layout as the data inlet and outlet for the system, device and process level respectively. The realization of these interfaces are presented and verified by design examples, which also proves that the enough flexibility in the design flow can really increase the design efficiency.