Modeling of a piezoelectric micro-scanner

TL;DR

This paper develops an analytical model for a piezoelectric micro-scanner with multimorph actuators, enabling design optimization and system-level simulation for optical applications.

Contribution

It provides a comprehensive theoretical model based on material strength equations for designing and optimizing piezoelectric silicon micro-scanners.

Findings

Calculated force profiles for multimorph actuators

Predicted mirror deflection angles

Optimized micro-scanner design parameters

Abstract

Micro-scanners have been widely used in many optical applications. The micro-scanner presented in this paper uses multimorph-type bending actuators to tilt a square plate mirror. This paper presents a complete analytical model of the piezoelectric micro-scanner. This theoretical model based on strength of material equations calculates the force generated by the multimorphs on the mirror, the profile of the structure and the angular deflection of the mirror. The proposed model, used to optimize the design of the piezoelectric silicon micro-scanner, is intended for further HDL integration, allowing in this way system level simulation and optimization.