Out-of-Plane Cmos Compatible Magnetometers

TL;DR

This paper introduces a novel 3D MEMS magnetometer utilizing residual stresses in multilayer cantilevers, achieving magnetic field detection with high sensitivity and demonstrating a new out-of-plane ferromagnetic nickel plate design.

Contribution

It presents a new out-of-plane MEMS magnetometer design using residual stresses and piezoresistive transducers, with finite element modeling for static and dynamic analysis.

Findings

Magnetic field of 10 Gauss measured

Sensitivity of 0.015 mV/Gauss achieved

Finite Element Model developed for device simulation

Abstract

Three-dimensional MEMS magnetometers with use of residual stresses in thin multilayers cantilevers are presented. Half-loop cantilevers based on Lorentz-force deflection convert magnetic flux in changes, thanks to piezoresistive transducers mounted in Wheatstone bridge. Magnetic field in the order of 10 Gauss was measured with a sensitivity of 0.015 mV/Gauss. A Finite Element Model of the device has been developed with Ansys for static and dynamic simulations. Novel out-of-plane ferromagnetic nickel plate magnetometer is also presented.