Simulation of valveless micropump and mode analysis
W.P. Lan, J.S. Chang, K.C. Wu, Y.C. Shih

TL;DR
This paper presents a 3-D simulation of a valveless micropump driven by piezoelectric materials, analyzing mode shapes and optimal frequency for maximum flow, with experimental verification of the simulation results.
Contribution
It introduces a detailed 3-D simulation of a valveless micropump considering solid-fluid coupling and mode analysis, identifying optimal operating frequency and mode transitions.
Findings
Optimal working frequency is 3.2K Hz for maximum flow.
Higher frequencies induce mode shifts and phase lag.
Mode transitions occur at 20K Hz and 30K Hz.
Abstract
In this work, a 3-D simulation is performed to study for the solid-fluid coupling effect driven by piezoelectric materials and utilizes asymmetric obstacles to control the flow direction. The result of simulation is also verified. For a micropump, it is crucial to find the optimal working frequency which produce maximum net flow rate. The PZT plate vibrates under the first mode, which is symmetric. Adjusting the working frequency, the maximum flow rate can be obtained. For the micrpump we studied, the optimal working frequency is 3.2K Hz. At higher working frequency, say 20K Hz, the fluid-solid membrane may come out a intermediate mode, which is different from the first mode and the second mode. It is observed that the center of the mode drifts. Meanwhile, the result shows that a phase shift lagging when the excitation force exists in the vibration response. Finally, at even higher…
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Taxonomy
TopicsMicrofluidic and Capillary Electrophoresis Applications · Advanced MEMS and NEMS Technologies · Analytical Chemistry and Sensors
