Parameter Identification of Pressure Sensors by Static and Dynamic Measurements

TL;DR

This paper presents a combined static and dynamic measurement approach for accurate parameter identification of pressure sensors, utilizing interferometric and modal response data with finite element modeling.

Contribution

It introduces a novel method that integrates static and dynamic measurements for comprehensive sensor parameter identification using inverse algorithms and FE models.

Findings

Effective identification of membrane thickness, intrinsic stress, and output voltage.

Quantitative evaluation enables classification of processing errors.

Method improves accuracy and reliability of pressure sensor calibration.

Abstract

Fast identification methods of pressure sensors are investigated. With regard to a complete accurate sensor parameter identification two different measurement methods are combined. The approach consists on one hand in performing static measurements - an applied pressure results in a membrane deformation measured interferometrically and the corresponding output voltage. On the other hand optical measurements of the modal responses of the sensor membranes are performed. This information is used in an inverse identification algorithm to identify geometrical and material parameters based on a FE model. The number of parameters to be identified is thereby generally limited only by the number of measurable modal frequencies. A quantitative evaluation of the identification results permits furthermore the classification of processing errors like etching errors. Algorithms and identification results for membrane thickness, intrinsic stress and output voltage will be discussed in this contribution on the basis of the parameter identification of relative pressure sensors.