Dispersion force for materials relevant for micro and nanodevices fabrication

TL;DR

This paper calculates dispersion forces between various materials relevant for micro and nanodevices using Lifshitz theory, providing correction factors and analyzing spectral and temperature effects to aid device design.

Contribution

It provides detailed dispersion force calculations for key materials using recent optical data, including temperature effects, to improve understanding of forces in micro and nanodevices.

Findings

Dispersion forces vary significantly with material and separation distance.

Optical properties in different spectral ranges influence force magnitude.

Temperature effects are notable for semiconductors and insulators.

Abstract

The dispersion (van der Waals and Casimir) force between two semi-spaces are calculated using the Lifshitz theory for different materials relevant for micro and nanodevices fabrication, namely, gold, silicon, gallium arsenide, diamond and two types of diamond-like carbon (DLC), silicon carbide, silicon nitride and silicon dioxide. The calculations were performed using recent experimental optical data available in the literature, usually ranging from the far infrared up to the extreme ultraviolet bands of the electromagnetic spectrum. The results are presented in the form of a correction factor to the Casimir force predicted between perfect conductors, for the separation between the semi-spaces varying from 1 nanometre up to 1 micrometre. The relative importance of the contributions to the dispersion force of the optical properties in different spectral ranges is analyzed. The role of the temperature for semiconductors and insulators is also addressed. The results are meant to be useful for the estimation of the impact of the Casimir and van der Waals forces on the operational parameters of micro and nanodevices.