Imaging Mechanism of Piezoresponse Force Microscopy in Capacitor Structures
Sergei V. Kalinin, Brian J. Rodriguez, Seung-Hyun Kim, S-K. Hong,, Alexei Gruverman, Eugene A. Eliseev

TL;DR
This paper analyzes the imaging mechanism of Piezoresponse Force Microscopy in capacitor structures, deriving analytical expressions for resolution, and discussing limitations and anomalies in domain wall imaging.
Contribution
It provides a detailed analytical framework for understanding PFM imaging in capacitors, including resolution dependence and applicability limits.
Findings
Resolution is a bilinear function of film and electrode thicknesses.
Opposite contributions of d31 and d33 can cause anomalous domain wall profiles.
Establishes limits for PFM use in polarization dynamics studies.
Abstract
The image formation mechanism in Piezoresponse Force Microscopy (PFM) of capacitor structures is analyzed. We demonstrate that the spatial resolution is a bilinear function of film and top electrode thicknesses, and derive the corresponding analytical expressions. For many perovskites, the opposite contributions of d31 and d33 components can result in anomalous domain wall profiles. This analysis establishes the applicability limits of PFM for polarization dynamics studies in capacitors, and applies to other structural probes, including focused X-ray studies of capacitor structures.
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